TY - JOUR A1 - Payton, E. A1 - Nolze, Gert T1 - The Backscatter Electron Signal as an Additional Tool for Phase Segmentation in Electron Backscatter Diffraction T2 - Microscopy and Microanalysis N2 - The advent of simultaneous energy dispersive X-ray spectroscopy (EDS) data collection has vastly improved the phase separation capabilities for electron backscatter diffraction (EBSD) mapping. A major problem remains, however, in distinguishing between multiple cubic phases in a specimen, especially when the compositions of the phases are similar or their particle sizes are small because the EDS interaction volume is much larger than that of EBSD, and the EDS spectra collected during spatial mapping are generally noisy due to time limitations and the need to minimize sample drift. The backscatter electron (BSE) signal is very sensitive to the local composition due to its atomic number (Z) dependence. BSE imaging is investigated as a complimentary tool to EDS to assist phase segmentation and identification in EBSD through examination of specimens of meteorite, Cu dross, and steel oxidation layers. The results demonstrate that the simultaneous acquisition of EBSD patterns, EDS spectra, and the BSE signal can provide new potential for advancing multiphase material characterization in the scanning electron microscope. KW - Electron backscatter diffraction KW - Energy dispersive x-ray spectroscopy KW - Scanning electron microscopy KW - Multiphase microstructure KW - Phase identification KW - Backscattered electron imaging KW - Meteorite KW - Monte Carlo simulation PY - 2013 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/37895 AN - OPUS4-37895 VL - 19 IS - 4 SP - 929 EP - 941 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany