TY - CONF A1 - Schmidt, R. A1 - Hodoroaba, Vasile-Dan T1 - SEM or TEM for the characterization of nanoparticles? N2 - Scanning Electron Microscopy (SEM) or Transmission Electron Microscopy (TEM) ? This is a question, nowadays discussed in EM labs of research and industry involved in the characterization and metrology of nanoparticles. The Scanning principle is adapted to TEM, the Transmission mode is adapted to Ultra High Resolution SEM. Can modern SEM replace TEM, reach atomic resolution even without Cs corrector or nm lateral resolution for X-ray Spectroscopy (EDX)? Due to the development of a New Cold Field Emission (NCFE) electron source Hitachi SEMs SU9000 and SU8200 can deliver routinely sub-nm image resolution and EDX mappings at very high count rates and a lateral EDX resolution of a few nm. A TiO2 sample provided by BAM was analysed at 30 kV using low kV STEM – simultaneously with the Through-the-lens (TTL) SE detector, the Bright Field transmission and Dark Field transmission signals. By this method a pixel-precise information of the particle’s surface using SE, its chemical nature using DF-STEM and its crystalline structure using Bright Field signal is given in one 40sec scan. The advantage of this observation mode compared to Ultra Low Voltage imaging is outlined. T2 - 7. NRW Nano-Konferenz CY - Münster, Germany DA - 07.12.2016 KW - SEM KW - TEM KW - Nanoparticles PY - 2016 AN - OPUS4-38936 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -