@misc{OPUS4-44412, title = {7th International Conference on Spectroscopic Ellipsometry (ICSE-7)}, booktitle = {Applied Surface Science}, editor = {Andreas Hertwig and N. Esser and K. Hinrichs and Uwe Beck}, volume = {421 Part B}, issn = {0169-4332}, doi = {10.1016/j.apsusc.2017.04.081}, url = {https://www.sciencedirect.com/journal/applied-surface-science/vol/421/part/PB}, type = {conferenceobjectvolume}, pages = {269 -- 916}, year = {2017}, }