TY - JOUR A1 - Fahrbach, M. A1 - Friedrich, Sebastian A1 - Behle, H. A1 - Xu, Min A1 - Cappella, Brunero A1 - Brand, U. A1 - Peiner, E. T1 - Customized piezoresistive microprobes for combined imaging of topography and mechanical properties JF - Measurement: Sensors N2 - Customized piezoresistive cantilever microprobes with a deflection range of 120 μm and silicon tips of 100 μm height were operated in a Cypher AFM showing their functionality for measuring topography together with stiffness, adhesion, and viscoelastic properties of thin films. KW - Cantilever microprobe KW - Piezoresistive KW - Atomic force microscopy KW - Force-distance curves KW - Contact resonance KW - Lubricants PY - 2021 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-524225 DO - https://doi.org/10.1016/j.measen.2021.100042 VL - 15 SP - 100042 PB - Elsevier Ltd. AN - OPUS4-52422 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -