TY - CONF A1 - Maiwald, Michael T1 - Towards "Process Sensors 4.0" - How to turn the vision to a mission? T2 - EPoSS Annual Forum 2015 T2 - EPoSS Annual Forum 2015 CY - Leuven, Belgium DA - 2015-10-11 PY - 2015 AN - OPUS4-35059 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -