TY - CONF ED - Beck, Uwe ED - Hertwig, Andreas ED - Sahre, Mario T1 - 4th Workshop Ellipsometry - Conference CD N2 - This CD contains all oral presentations of the 4th Workshop Ellipsometry and the poster-documents as received in PDF-format for publication until April 30th, 2006. T2 - 4th Workshop Ellipsometry CY - Berlin DA - 2006-02-20 KW - Ellipsometry KW - Oberflächentechnik PY - 2006 SN - 978-3-00-018751-3 SP - 1 CD EP - ROM PB - Bundesanstalt für Materialforschung und -prüfung CY - Berlin AN - OPUS4-12480 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -