TY - CONF A1 - Gornushkin, Igor B. A1 - Sennikov, P. T1 - Laser induced gas breakdown in reactive mixtures containing halides of boron and silicon: diagnostics and modeling N2 - We run two pilot LIP experiments in reactive gas mixtures. First, LIP is excited in BCl3 or BF3 plus H2 or CH4 to evaluate the efficiency of deposition of solid boron and boron carbide, materials that are largely used for refractory coatings. Second, we investigate a possibility of synthesis of fluorochlorosilanes SiFxCl4-x (x = 1, 2, 3) by LIP induced in SiF4+SiCl4 gas mixtures. Using fluorochlorosilanes with different combinations of F and Cl in the SiFxCly molecule may add flexibility in processes of silicon deposition and etching. The gases used and solid deposits are analyzed by optical emission spectroscopy (OES) and IR and mass spectrometry (MS). We also model the laser induced plasma by performing static equilibrium chemistry calculations to see whether desired reaction products are thermodynamically favorable and dynamic calculations of the expanding plasma plume to see how and where the products form. T2 - International Workshop on Laser Induced breakdown Spectroscopy CY - Online meeting DA - 01.12.2020 KW - Silicon halides KW - Chemical vapor deposition KW - Laser induced dielectric breakdown KW - Hydrogen reduction PY - 2020 AN - OPUS4-51725 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -