TY - CONF A1 - Gornushkin, Igor T1 - Improved Data Processing for Accurate Plasma Diagnostics and Calibration-Free LIBS N2 - Many applications of LIBS require the measurement of plasma temperature and electron density, which in turn requires knowledge of the integrated line intensity and the shape of the spectral lines. While the integral intensity is preserved as light passes through the spectrometer, the shape emitted by an individual atom or ion is greatly distorted. This is due, firstly, to the transfer of light through the plasma (self-absorption), secondly, to the influence of the instrumental function of the spectrometer, and, thirdly, to the aberrations of the optical system. In addition, processing of spectral information, such as background removal, noise reduction, deconvolution, and line fitting, introduces additional errors in the reconstructed linewidth and line integral, which leads to erroneous temperature and electron density values. This communication will be devoted to the general shortcomings of spectral data processing and the resulting inaccuracies in determining the plasma parameters. The analysis is based on the use of synthetic spectra generated by plasma with known temperature and particle density. The estimation of errors caused by inadequate processing of the spectral data is made by comparing the initial and determined plasma parameters. As a result, an improved data processing method will be proposed that takes into account the spectrum distortion by the instrumental function and integration on the pixel detector. The former is accounted for by convolution (instead of deconvolution) of the estimated line profile using a predetermined slit function, and the latter is achieved by piecewise integration of the line profile by the pixel detector, taking into account the pixel size and uniform or non-uniform pixel separation. Recommendations will be made for which analytic function best approximates the observed spectral lines and examples will be given for the application of this routine to calibration-free LIBS using both synthetic and experimental data. T2 - SciX 2023 CY - Sparks, USA DA - 08.10.2023 KW - Laser induced plasma KW - Calibration-free analysis KW - Plasma modeling KW - Emission spectroscopy PY - 2023 AN - OPUS4-58591 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -