TY - CONF A1 - Gornushkin, Igor B. T1 - Modeling Equilibrium Chemistry in Laser Induced Plasmas and Plasma Chemical Reactors N2 - A brief introduction will be given on modeling chemical reactions in laser induced plasmas using stoichiometric and non-stoichiometric approaches. Several applications will be considered, which can benefit from such modeling. Those include plasma enhanced chemical vapor deposition (PECVD), surface modification and surface coating, and molecular analysis by LIBS. Each application will be illustrated by simulations of relevant chemical systems. For PECVD, chemical systems are BCl3/H2/Ar, BF3/H2/Ar, BCl3/BF3, Mo/BF3/H2; for surface modification/coating it is Ti/air; for molecular LIBS they are CaCO3/Ar, Ca(OH)2/Ar, and CaCl2/Ar. Advantages and shortcomings of equilibrium chemical hydrodynamic models of laser induced plasmas will be discussed. T2 - 1st NIP Conference National Institute of Physics (IKF), the Albanian Academy of Sciences CY - Online meeting DA - 10.02.2022 KW - Laser ablation KW - Laser induced plasma deposition KW - Surface coating KW - Titanium dioxide KW - Emission spectroscopy KW - Hydrodynamic model KW - Plasma chemistry PY - 2022 AN - OPUS4-54328 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -