@article{GornushkinShabanovSennikov2019, author = {Igor B. Gornushkin and Sergej V. Shabanov and P. G. Sennikov}, title = {Equilibrium Chemistry in BCl3-H2-Ar Plasma}, journal = {Plasma Chemistry and Plasma Processing}, volume = {39}, number = {4}, pages = {1087 -- 1102}, doi = {10.1007/s11090-019-09985-6}, year = {2019}, }