TY - CONF A1 - Cios, Grzegorz A1 - Hodoroaba, Vasile-Dan A1 - Tokarski, T. A1 - Bala, P. T1 - High throughput nanoparticle analysis using transmission Kikuchi diffraction N2 - In the present paper we show an approach of measuring large numbers of nanoparticles in a single scan TKD. TiO2 anatase nanoparticles (NP) of bipyramidal shape were deposited on standard carbon grid used for TEM. The procedure used promoted formation of NP ‘monolayer’ islands with uniform distribution of NPs on the carbon surface which allowed mapping of large number of nanoparticles in the single island. Collection of whole map covering ~2800 nanoparticles took nearly 20 minutes. Inverse pole figure color coded map indicates that the NPs are either lying on a {101} facet (within 10° range around perfect {101} parallel to the carbon surface orientation) on the carbon film or are lying on a {100} facet (within 10° range around the perfect {100} parallel to the carbon surface orientation). Very unlikely was the NP orientation standing on a {001} face. The NPs size distribution described as equivalent circle diameter (ECD) has been also evaluated and the mean NP ECD was 59 nm with standard deviation of 15 nm, i.e. in good agreement with electron microscopy or AFM results. This study shows high potential of the technique for crystalline NPs analysis with respect to geometrical orientation of the particles on the substrate. With known orientation, the 3D dimensional characterisation of such non-spherical NPs becomes possible from 2D projection electron micrographs. Moreover, the NP size distribution can be easily extracted. Superior accuracies down to 1-2 nm are achievable. The approach is applicable also on thin lamellae extracted from particulate (or mesoporous) layers. T2 - EMAS 2023 - 17th European Workshop on Modern Developmennts and Applications in Microbeam Analysis CY - Krakow, Poland DA - 07.05.2023 KW - Nanoparticles KW - TKD KW - Electron microscopy KW - TiO2 KW - Orientation PY - 2023 UR - https://www.microbeamanalysis.eu/events/event/60-emas-2023-17th-european-workshop-on-modern-developments-and-applications-in-microbeam-analysis AN - OPUS4-57519 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -