TY - CONF A1 - Ermilova, Elena A1 - Hertwig, Andreas A1 - Beck, Uwe A1 - Schneider, S. A1 - Peters, S. T1 - Standardization of spectroscopic ellipsometry as GUM-compliant accredited measurement method N2 - Ellipsometry has become a powerful measurement tool in semiconductor industry since the sixties of the last century. Early standardization activities focused exclusively on SiO2/Si (ASTM F 576-01, SEMI 3624). The first generic standard dealing with ellipsometry is DIN 50989-1:2018 Ellipsometry – Part 1: Principles. Standardization is a prerequisite for accreditation according to DIN EN ISO/IEC 17025 and the evaluation of uncertainty budgets. T2 - 8th International conference on spectroscopic CY - Barcelona, Spain DA - 26.05.2019 KW - Standardization of Ellipsometry KW - GUM-compliance KW - Uncertainty budgets KW - Bulk material PY - 2019 AN - OPUS4-48348 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -