TY - GEN A1 - Heunisch, Andreas T1 - In Situ Characterization of the Sintering Behavior of LTCC Laminates with Embedded Cavities by High Temperature Laser Profilometry T2 - IMAPS/ACerS 8th Int. Conf. and Exhib. on Ceramic Interconnect and Ceramic Microsystems Technolgies (CICMT 2013) T2 - IMAPS/ACerS 8th Int. Conf. and Exhib. on Ceramic Interconnect and Ceramic Microsystems Technolgies (CICMT 2013) CY - Orlando, FL, USA DA - 2013-04-23 PY - 2013 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/29118 AN - OPUS4-29118 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany