@article{TasdemirWollschlaegerOesterleetal.2016, author = {Z. Tasdemir and Nicole Wollschl{\"a}ger and Werner {\"O}sterle and Y. Leblebici and B. E. Alaca}, title = {A deep etching mechanism for trench-bridging silicon nanowires}, journal = {Nanotechnology}, volume = {27}, number = {9}, pages = {095303-1 -- 095303-8}, doi = {10.1088/0957-4484/27/9/095303}, year = {2016}, }