TY - JOUR A1 - Winkelmann, Aimo A1 - Nolze, Gert T1 - Channeling-enhanced EDX for polarity resolved crystal orientation determination T2 - Crystal Research and Technology N2 - Using channeling-enhanced energy-dispersive X-ray spectroscopy (EDX), we demonstrate polarity sensitive orientation determination of a non-centrosymmetric crystal in the scanning electron microscope. The authors observe a characteristic asymmetry in the channeling-enhanced, angle-dependent EDX data of a GaAs sample, which is in good agreement to simulations using the dynamical theory of diffraction for the incident electron beam. This allows us to assign the orientation of the GaAs crystal according to the non-centrosymmetric point group. The method shown here overcomes the limitation of a reduced point-group sensitivity of electron backscatter diffraction Patterns and electron channeling patterns for crystalline phases that contain atoms of approximately equal electron scattering cross sections. KW - Channeling KW - EDX KW - EDS KW - Composition KW - GaAs KW - GaP PY - 2016 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/38098 AN - OPUS4-38098 SN - 0232-1300 SN - 0023-4753 VL - 51 IS - 12 SP - 752 EP - 756 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany