TY - JOUR A1 - Marzok, Ulrich A1 - Müller, Ralf A1 - Schadrack, Reinhard A1 - Krauhausen, M. A1 - Burgstedt, F. A1 - Brode, W. A1 - Reetz, R. T1 - High-temperature laser profilometry for ceramic tapes T2 - Ceramic Forum International : cfi N2 - Advanced ceramics are promising key components for microsystems engineering, communication Technology and medical engineering. Driven by steadiiy increasing demands on dimensional accuracy of components and Integration density, sintering has to be controlled at an unprecedented degree of precision. Being most crucial for components of complex shape, graded or heterogeneous-composed parts like LTCC multilayers for microsystems, precise control of sintering has a decisive influence on the dimensional accuracy, mechanical integrity and reliability of sintered components. Thus, permanent or temporary shape distortions or warping during sintering may result from spatially heterogeneous microstructure and temperature distribution, e.g. during the co-firing process of green multilayer Stacks printed with metallization and other functional pastes. Whereas permanent warping can be easily measured after sintering, temporary warping during firing is more difficult to measure. Nonetheless, this effect may cause latent failures later, which often limit the applicability of ceramic components. PB - Göller CY - Baden-Baden PY - 2013 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/28500 AN - OPUS4-28500 SN - 0173-9913 SN - 0196-6219 VL - 90 IS - 4 SP - E35 EP - E40 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany