TY - CONF A1 - Heunisch, Andreas A1 - Marzok, Ulrich A1 - Münchow, Marco A1 - Müller, Ralf A1 - Rabe, Torsten T1 - In situ characterization of the sintering behavior of LTCC laminates with embedded cavities by high temperature laser profilometry T2 - CICMT 2013 - IMAPS/ACerS 9th International conference and exhibition on ceramic interconnect and ceramic microsystems technologies T2 - CICMT 2013 - IMAPS/ACerS 9th International conference and exhibition on ceramic interconnect and ceramic microsystems technologies CY - Orlando, FL, USA DA - 2013-04-23 KW - LTCC multilayer KW - Embedded cavities KW - High temperature laser profilometry KW - Low pressure lamination KW - Micro fluidics PY - 2013 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/35077 AN - OPUS4-35077 SP - 275 EP - 282 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany