TY - JOUR A1 - Vos, M. A1 - Winkelmann, Aimo A1 - Nolze, Gert T1 - Element-specific Kikuchi patterns of Rutile T2 - Ultramicroscopy N2 - The kinetic energy of keV electrons backscattered from a rutile (TiO2) surface depends measurably on the mass of the scattering atom. This makes it possible to determine separately the angular distribution of electrons backscattered elastically from either Ti or O. Diffraction effects of these backscattered electrons inside the rutile crystal lead to the formation of Kikuchi patterns. The element-resolved Kikuchi patterns of Ti and O differ characteristically, but each can be described fairly well in terms of the dynamical theory of diffraction. Qualitatively, much of the differences can be understood by considering the relative arrangement of the Ti and O atoms with respect to planes defined by the crystal lattice. KW - Electron Rutherford backscattering KW - TiO2 KW - Kikuchi pattern KW - EBSD pattern KW - Simulation PY - 2015 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/37787 AN - OPUS4-37787 SN - 0304-3991 VL - 156 SP - 50 EP - 58 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany