TY - GEN A1 - Mieller, Björn T1 - Concept and Manufacturing of a Pressure Sensor Based on al LTCC Thin Film Strain Gauge T2 - IMAPS/ACerS 10th Int. Conf. and Exhib. on Ceramic Interconnect and Ceramic Microsystems Technolgies (CICMT 2014) T2 - IMAPS/ACerS 10th Int. Conf. and Exhib. on Ceramic Interconnect and Ceramic Microsystems Technolgies (CICMT 2014) CY - Osaka, Japan DA - 2014-04-14 PY - 2014 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/31324 AN - OPUS4-31324 N1 - Geburtsname von Mieller, Björn: Brandt, B. - Birth name of Mieller, Björn: Brandt, B. AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany