TY - CONF A1 - Unger, Wolfgang T1 - The Activities of the CCQM Surface Analysis Working Group (SAWG) - Achievements and Challenges in Metrology in Surface and Thin Film Analysis T2 - EURAMET TC-MC Plenary Meeting T2 - EURAMET TC-MC Plenary Meeting CY - Braunschweig, Germany DA - 2013-02-07 PY - 2013 AN - OPUS4-27656 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -