TY - CONF A1 - Unger, Wolfgang T1 - Metrology for spatially resolved chemical analysis at the micro and nanometre scales - Surface Analysis Working Group (SWAG) 11th Meeting for 2012/13 T2 - CCQM Plenary Meeting 2013 T2 - CCQM Plenary Meeting 2013 CY - Paris, France DA - 2013-04-18 PY - 2013 AN - OPUS4-28799 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -