TY - GEN A1 - Senoner, Mathias A1 - Wirth, Thomas A1 - Unger, Wolfgang A1 - Österle, Werner A1 - Kaiander, I. A1 - Sellin, R. L. A1 - Bimberg, D. A2 - Wilkening, G. A2 - Koenders, L. T1 - Testing the Lateral Resolution in the Nanometre Range with a New Type of Certified Reference Material T2 - Nanoscale calibration standards and methods PB - Wiley-VCH CY - Weinheim T2 - NanoScale 2004 Seminar ; 6th Seminar on Quantitative Microscopy ; 2nd Seminar on Nanoscale Calibration Standards and Methods CY - Braunschweig, Germany DA - 2004-03-25 KW - Laterale Auflösung KW - Nanometrologie KW - Nanotechnologie KW - Oberflächenanalytik KW - Zertifiziertes Referenzmaterial PY - 2004 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/7541 AN - OPUS4-7541 SN - 3-527-40502-X SP - 282 EP - 294 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany