TY - JOUR A1 - Reier, T. A1 - Schultze, J.W. A1 - Ă–sterle, Werner A1 - Buchal, Ch. T1 - The growth of aligned AIN-nanocrystals in aluminium after nitrogen-ion implantation at 330 K T2 - Thin solid films PB - Elsevier CY - Amsterdam KW - AIN KW - Al2O3 KW - Ion implantation KW - Diffusion KW - Nanocrystals PY - 2001 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/7643 AN - OPUS4-7643 SN - 0040-6090 VL - 385 SP - 29 EP - 35 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany