TY - CONF A1 - Beck, Uwe A1 - Weise, Matthias ED - Bräuer, G. T1 - Replica-Techniques for Indirect Inspection of Surface and Coating Defects and for Evaluation of Topography and Topometry of 3D-Shaped Surfaces T2 - Proceedings of the Eight International Conference on Plasma Surface Engineering (Surface & coatings technology 174/175.2003) T2 - 8th International Conference on Plasma Surface Engineering (PSE) CY - Garmisch-Partenkirchen, Germany DA - 2002-09-09 PY - 2002 SN - 0257-8972 VL - 174-175 IS - TuPSC24 SP - 264 PB - Elsevier CY - Amsterdam AN - OPUS4-1622 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -