TY - JOUR A1 - Kühn, Julius A1 - Hodoroaba, Vasile-Dan A1 - Linke, S. A1 - Moritz, W. A1 - Unger, Wolfgang T1 - Characterization of Pd-Ni-Co alloy thin films by ED-EPMA with application of the STRATAGEM software JF - Surface and interface analysis N2 - Ternary thin film alloys based on Pd, Ni and Co on silicon wafers have been characterized in order to determine elemental composition and thickness. A broad variety of alloy compositions was obtained on one and the same substrate by magnetron dc-co-sputter deposition. Energy-dispersive electron probe X-ray microanalysis of these 'multi' alloy composition samples is performed in a non-destructive, precise and, if optimized, also in a time-saving way. The local thickness of the layers under study was in between 50 nm and 250 nm. Pure element bulk materials have been employed as reference specimens. The results attained in this study are compared to those obtained by other analytical methods as Auger electron spectroscopy and X-ray photo electron spectroscopy. KW - Ternary alloys KW - Film thickness KW - Elemental composition KW - Quantification KW - K-values KW - ED-EPMA KW - STRATAGEM PY - 2012 DO - https://doi.org/10.1002/sia.4974 SN - 0142-2421 SN - 1096-9918 VL - 44 IS - 11-12 SP - 1456 EP - 1458 PB - Wiley CY - Chichester AN - OPUS4-27273 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -