TY - JOUR A1 - Sturm, Heinz A1 - Heyde, M. A1 - Rademann, K. T1 - Measuring SPM Piezo Displacement Responses JF - Microscopy today PY - 1999 SN - 1551-9295 VL - 99 IS - 4 SP - 24 EP - 26 PB - Microscopy Society of America CY - Wappingers Falls, NY AN - OPUS4-6860 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -