TY - JOUR A1 - Angeli, J. A1 - Bengtson, A. A1 - Bogaerts, A. A1 - Hoffmann, V. A1 - Hodoroaba, Vasile-Dan A1 - Steers, E. T1 - Glow discharge optical emission spectrometry: moving towards reliable tion film analysis - a short review JF - Journal of analytical atomic spectrometry N2 - Glow discharge optical emission spectroscopy (GD-OES) is briefly reviewed, with particular reference to topics relevant to the application field of near surface and thin film analysis. The special needs and requirements for thin film analysis, in contrast to coating and bulk analysis, are pointed out. A task list is developed which shows the requirements of further developments to the technique and the fundamentals. The state-of-the-art is presented in measurement technique, GD source control and design, the effect of traces of molecular gases, correction and quantification procedures, contributions of modelling and, finally, reference materials for thin film analysis. PY - 2003 DO - https://doi.org/10.1039/b301293j SN - 0267-9477 SN - 1364-5544 VL - 18 IS - 6 SP - 670 EP - 679 PB - Royal Society of Chemistry CY - London AN - OPUS4-2533 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -