TY - GEN A1 - Heunisch, Andreas T1 - Fabrication and Characterization of Low Temperature Co-fired Ceramic Multilayer with Embedded Cavities T2 - Junior Euromat 2012 T2 - Junior Euromat 2012 CY - Lausanne, Switzerland DA - 2012-07-23 PY - 2012 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/26529 AN - OPUS4-26529 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany