TY - CONF A1 - Hertwig, Andreas A1 - Koter, Robert A1 - Bonse, Jörn A1 - Weise, Matthias A1 - Beck, Uwe A1 - Krüger, Jörg A1 - Picquart, M. A1 - Haro-Poniatowski, E. T1 - Blistering and layer modification of hydrogenated amorphous carbon layers induced by femtosecond laser pulse irration T2 - Bunsentagung 2011 T2 - Bunsentagung 2011 CY - Berlin, Germany DA - 2011-06-02 PY - 2011 AN - OPUS4-23361 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -