TY - CONF A1 - Hertwig, Andreas A1 - Krüger, Hannes A1 - Kemnitz, E. A1 - Beck, Uwe T1 - MgF2 moderate temperature sol-gel deposition for optical UV-applications T2 - BESSY Usertreffen T2 - BESSY Usertreffen CY - Berlin, Germany DA - 2006-12-07 PY - 2006 AN - OPUS4-14221 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -