TY - CONF A1 - Hertwig, Andreas A1 - Krüger, Jörg A1 - Beck, Uwe A1 - Weise, Matthias T1 - Hydrogen-containing amorphous carbon layers as optical materials for the NIR and MIR spectral range T2 - Plasma Surface Engineering (PSE 2006) T2 - Plasma Surface Engineering (PSE 2006) CY - Garmisch-Partenkirchen, Germany DA - 2006-09-11 PY - 2006 AN - OPUS4-12468 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -