TY - CONF A1 - Hertwig, Andreas A1 - Beck, Uwe A1 - Kemnitz, E. A1 - Krüger, Hannes T1 - Moderate temperrature sol-gel deposition of fluoride films for optical UV-applications: an ellipsometrc study on homogeneity T2 - International Conference on Spectroscopic Ellipsoemtry T2 - International Conference on Spectroscopic Ellipsoemtry CY - Stockholm, Sweden DA - 2007-06-11 PY - 2007 AN - OPUS4-14955 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -