TY - CONF A1 - Hertwig, Andreas A1 - Beck, Uwe T1 - Standardisation in the analysis of complex thin film systems with ellipsometry T2 - Workshop Ellipsometry 2012 T2 - Workshop Ellipsometry 2012 CY - Leipzig, Germany DA - 2012-03-05 PY - 2012 AN - OPUS4-25685 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -