TY - JOUR A1 - Beck, Uwe A1 - Hertwig, Andreas A1 - Kormunda, M. A1 - Krause, Andreas A1 - Krüger, Hannes A1 - Lohse, Volkmar A1 - Nooke, Alida A1 - Pavlik, J. A1 - Steinbach, J. T1 - SPR enhanced ellipsometric gas monitoring on thin iron doped tin oxide layers T2 - Sensors and actuators B: Chemical N2 - In this work, thin iron doped tin oxide layers (3–6 nm) were investigated with regard to gas sensitivity by means of surface plasmon resonance (SPR) effect with ellipsometric readout. The experimental set-up was a Kretschmann configuration with gold as metal layer. The sensor system was exposed to different concentrations of methane in the low ppm range and the sensor response of an uncoated gold layer compared to a gold layer coated with iron doped tin oxide. The additional layer effects stability with regard to drift behavior of the sensor and an increase in sensitivity. Furthermore, the sensor is able to detect the toxic gas carbon monoxide in low concentration range (down to 0.5 ppm). The thin layers were investigated by X-ray photoelectron spectroscopy, secondary electron microscopy and spectroscopic ellipsometry. The possible mechanisms taking place on the surface are discussed. PB - Elsevier CY - Amsterdam [u.a.] KW - Gas sensing KW - SPR effect KW - Iron doped tin oxide KW - Ellipsometry PY - 2011 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/24826 AN - OPUS4-24826 SN - 0925-4005 SN - 1873-3077 VL - 160 IS - 1 SP - 609 EP - 615 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany