TY - JOUR A1 - Ludwig, M. H. A1 - Augustin, A. A1 - Hummel, R. E. A1 - Gross, Thomas T1 - On the formation process of luminescing centers in spark-processed silicon JF - Journal of applied physics KW - Silikon, funkenerodiert KW - Röntgenphotonspektroskopie KW - Photoluminiszenz PY - 1996 SN - 0021-8979 SN - 1089-7550 VL - 80 IS - 9 SP - 5318 EP - 5324 PB - American Institute of Physics CY - Melville, NY AN - OPUS4-638 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -