TY - GEN A1 - Unger, Wolfgang T1 - Metrology for spatially resolved chemical analysis at the micro and nanometre scales Surface Analysis Working Group (SAWG) - Report for 16th Meeting (2017/18) N2 - Following the 2017 meeting, progress with the Key Comparison CCQM-K153 related to the BET specific surface lead by UNIIM and the Pilot Study P-190 “Thickness Measurement of nm HfO2 Films” lead by KRISS will be discussed. The 16th meeting of SAWG will focus on •survey on CMC claims submitted with reference to K-129 and K-136. •the overall and SAWG specific aspects of the CCQM Strategy process, •a consideration of comparisons on convention methods as recommended by the CCQM Plenary Meeting 2017, •the 2019 CCQM Workshop and paper(s) for Metrologia’s Special Issue, •discussion of future comparisons. T2 - 24th meeting of the CCQM 2018 CY - Paris, France DA - 19.04.2018 KW - Surface chemical analysis KW - Metrology KW - Inter-laboratory comparisons PY - 2018 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/44998 AN - OPUS4-44998 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany