TY - JOUR A1 - Hodoroaba, Vasile-Dan A1 - Salge, T. A1 - Terborg, R. A1 - Rackwitz, Vanessa T1 - Advanced elemental analysis with ED-EPMA, WD-EPMA and mu-XRF at a SEM T2 - Microscopy and microanalysis N2 - It is a latent wish of any SEM/EDS (scanning electron microscope with an energy dispersive spectrometer) analyst to “see more” of the analyzed specimen, i.e. to improve the existing analytical figures of merit. One key issue are the relatively poor limits of detection (not below 0.1 mass-%) provided by energy dispersive X-ray spectrometry (EDX) with the conventional electron excitation (ED-EPMA). This is a consequence of relatively low peak-to-background ratios and reduced energy resolution when compared to wavelength dispersive spectrometry (WD-EPMA). Recent technological developments make possible to equip the SEM with a wavelength dispersive spectrometer (WDS), so that significantly better energy resolution can be attained. Also a relative new product that can be easily attached to a SEM/EDS system is a micro-focus X-ray source. Hence, it is possible to perform (micro-focus) X-ray fluorescence spectrometry (μ-XRF) and take advantage of the enhanced peak-to-background ratios (well suited for trace analysis). However, there are also some disadvantages: an increased measurement time and excitation with a high current in the 10s of nA range are usually required for WDS. μ-XRF provides more bulk information and poor limits of detection for light elements. By combining the advantages of these analytical techniques “seeing more” becomes possible. PB - Cambridge University Press CY - New York, NY KW - ED-EPMA KW - WD-EPMA KW - (mu-)XRF KW - EDX PY - 2011 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/26751 AN - OPUS4-26751 SN - 1431-9276 SN - 1435-8115 VL - 17 IS - Suppl. 2 SP - 600 EP - 601 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany