TY - CONF A1 - Sturm, Heinz A1 - Schröter, Maria-Astrid A1 - Weimann, Christiane A1 - Holzschneider, M. T1 - Imaging and simulation of mode shapes and harmonics of AFM cantilevers using Scanning Electron Microscopy T2 - 4th Multifrequency AFM Conference T2 - 4th Multifrequency AFM Conference CY - Madrid, Spain DA - 2012-10-15 PY - 2012 AN - OPUS4-27342 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -