TY - CONF A1 - Sturm, Heinz T1 - Scanning Force Microscopy based Lithography T2 - Anwendertreffen JPK Instruments T2 - Anwendertreffen JPK Instruments CY - Berlin, Germany DA - 2003-09-18 PY - 2003 AN - OPUS4-2916 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -