TY - CONF A1 - Sturm, Heinz A1 - Heyde, M. A1 - Rademann, K. T1 - Recipes for the Calibration of Piezos with a Fibre Optical Displacement Sensor for Scanning Probe Microscopy Usage T2 - 10th International Symposium on Electrets (ISE 10) T2 - 10th International Symposium on Electrets (ISE 10) CY - Delphi, Greece DA - 1999-09-22 PY - 1999 AN - OPUS4-6501 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -