TY - CONF A1 - Sturm, Heinz T1 - Scanning force mocroscopy based lothography T2 - JPK-Wirkshop "Scanning probe microscopy in life science" T2 - JPK-Wirkshop "Scanning probe microscopy in life science" CY - Berlin, Germany DA - 2003-09-18 PY - 2003 AN - OPUS4-4653 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -