TY - CONF A1 - Sturm, Heinz A1 - Heyde, M. A1 - Munz, Martin A1 - Rademann, K. T1 - Recipes for the Calibration of Piezos with a cheap and easy-to-use Fibre Optical Displacement Sensor T2 - 2nd German Brazilian Workshop on Applied Surface Science T2 - 2nd German Brazilian Workshop on Applied Surface Science CY - Templin, Germany DA - 1998-09-21 PY - 1998 AN - OPUS4-6465 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -