TY - CONF A1 - Ritter, Martin A1 - Kranzmann, Axel A1 - Koenders, L. A1 - Dziomba, T. A1 - Friedrich, Andreas T1 - Accuracy estimation of SPM 3D-Calibration by Error separation T2 - Nanoscale 2008 T2 - Nanoscale 2008 CY - Turin, Italy DA - 2008-09-22 PY - 2008 AN - OPUS4-18446 LA - deu AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -