TY - CONF A1 - Ritter, Martin A1 - Dziomba, T. A1 - Kranzmann, Axel A1 - Koenders, L. T1 - A landmark based 3D calibration strategy for SPM T2 - Nanoscale 2006, METAS T2 - Nanoscale 2006, METAS CY - Wabern, Switzerland DA - 2006-04-24 PY - 2006 AN - OPUS4-12174 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -