TY - RPRT A1 - Ecker, K. H. A1 - Wätjen, U. A1 - Berger, Achim A1 - Grötzschel, R. A1 - Persson, L. A1 - Pritzkow, W. A1 - Radtke, Martin A1 - Riebe, Gundel A1 - Riesemeier, Heinrich A1 - Vogl, Jochen T1 - Certification of antimony implanted in silicon wafer with a silicon dioxide diffusion barrier - IRMM-302 and BAM-L001 T2 - IRMM and BAM Information Reference Materials N2 - This Report describes the certification of the reference material antimony implanted in Si/SiO2 intended to be used for calibration of surface and near surface analytical methods. It describes the preparation, homogeneity measurements and the analytical work performed for the certification of both Areal density of antimony Atoms (retained dose) and the isotope amount Ratio as well as giving considerations on the stability of the material. PB - Institute for Reference Materials and Measurements CY - Geel, Belgium KW - Isotope ratio KW - Areal density KW - Surface analysis PY - 2002 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/35575 AN - OPUS4-35575 UR - https://nbn-resolving.org/urn:nbn:de:kobv:b43-355752 SP - 1 EP - 40 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany