TY - JOUR A1 - Payton, E. J. A1 - Agudo Jácome, Leonardo A1 - Nolze, Gert T1 - Phase Identification by Image Processing of EBSD Patterns T2 - Microscopy and Microanalysis N2 - Automated electron backscatter diffraction (EBSD) is generally unable to distinguish between multiple cubic phases in a specimen without additional information, such as that obtained by simultaneous energy dispersive X-ray spectroscopy (EDS). Small particles of phases with relatively similar compositions push the limits of phase identification using simultaneous EBSD and EDS, and a mismatch exists between the spatial resolutions of these two techniques due to them having different electron interaction volumes. In a recent paper, the present authors explored using backscatter detectors mounted on top of the EBSD detector to obtain atomic number (Z) contrast images that could be used for phase segmentation in cases where the results from the EBSD and EDS signals remain ambiguous. In the present work, we show that similar information can be obtained from the raw EBSD patterns themselves at higher spatial resolution than was obtained from the backscatter detectors, with the additional advantage of having no spatial mismatch between the data collection grids. KW - Phase identification KW - Backscattered electrons KW - EBSD KW - SEM PY - 2013 UR - https://opus4.kobv.de/opus4-bam/frontdoor/index/index/docId/37985 AN - OPUS4-37985 VL - 19 IS - Suppl. 2 SP - 842 EP - 843 AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany