TY - CONF A1 - Oran, Umut A1 - Swaraj, Sufal A1 - Unger, Wolfgang A1 - Friedrich, Jörg F. T1 - TOF-SIMS analysis of plasma chemically deposited co-polymer films T2 - 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV) T2 - 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV) CY - Manchester, England DA - 2005-09-12 PY - 2005 AN - OPUS4-11279 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -