TY - JOUR A1 - Wendt, U. A1 - Nolze, Gert T1 - FIB Milling and Canneling JF - GIT Imaging & Microscopy KW - Topography KW - Etching rate KW - EBSD KW - AFM PY - 2007 SN - 1439-4243 SN - 1863-7809 VL - 9 IS - 3 SP - 34 EP - 36 PB - GIT-Verl. CY - Darmstadt AN - OPUS4-15749 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -