TY - JOUR A1 - Wendt, U. A1 - Nolze, Gert T1 - Correlation between crystal orientation, channeling contrast and topography during FIB milling of Cu studied by FIB, EBSD, SEM, and AFM JF - Praktische Metallographie = Practical metallography KW - TEM-Präparation KW - Abtragsrate PY - 2007 SN - 0032-678X VL - 44 IS - 5 SP - 236 EP - 238 PB - Hanser CY - München AN - OPUS4-14970 LA - eng AD - Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany ER -