@article{BonseMannKruegeretal.2013, author = {J{\"o}rn Bonse and Guido Mann and J{\"o}rg Kr{\"u}ger and M. Marcinkowski and M. Eberstein}, title = {Femtosecond laser-induced removal of silicon nitride layers from doped and textured silicon wafers used in photovoltaics}, journal = {Thin solid films}, volume = {542}, pages = {420 -- 425}, doi = {10.1016/j.tsf.2013.07.005}, year = {2013}, }